000 | 00421nam a2200145Ia 4500 | ||
---|---|---|---|
008 | 230914s2006||||xx |||||||||||||| ||und|| | ||
082 |
_a8273 4/5 620.5 _bLEO-M |
||
100 | _aLeondes, Comelius T. | ||
245 | 0 | _aMEMS/NEMS: Handbook Techniques and Applications: Volume-4 Sensors & Actuators | |
260 |
_aUSA _bSpringer _c2006 |
||
300 | _axviii, 386p. | ||
650 | _aMEMS/NEMS | ||
650 | _aSensors & Actuators | ||
942 | _cBK | ||
999 |
_c2265 _d2265 |