000 | 00421nam a2200157Ia 4500 | ||
---|---|---|---|
008 | 230914s2008||||xx |||||||||||||| ||und|| | ||
020 | _a9780470083017 | ||
082 | _a621.381 | ||
100 | _aHsu, Tai Ran | ||
245 | 0 | _aMEMS and Microsystems: Design, Manufacture and nonoscale engineering | |
250 | _a2d | ||
260 |
_aNew Jersy USA _bJohn Wiley _c2008 |
||
300 | _axxv, 550 | ||
700 | _aNagarajan, Abhishek | ||
942 | _cBK | ||
999 |
_c2259 _d2259 |