TY  - BOOK
AU  - Hsu, Tai Ran
AU  - Nagarajan, Abhishek
TI  - MEMS and Microsystems: Design, Manufacture and nonoscale engineering
SN  - 9780470083017
U1  - 621.381 
PY  - 2008///
CY  - New Jersy USA
PB  - John Wiley
ER  -